For more information about this meeting, contact Stephen Simpson.
| Title: | An inverse problem arising in photolithography |
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| Seminar: | Department of Mathematics Colloquium |
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| Speaker: | Fadil Santosa, IMA, University of Minnesota |
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| Abstract Link: | http://www.math.umn.edu/~santosa/ |
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| Abstract: |
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| Photolithography is a key process in the manufacturing of
chips. In this presentation, we will start with an introduction to the
subwavelength projection photolithography. The basic problem is that of
optimal design. It involves creating masks through which light is
projected to produce a desired intensity pattern. I will describe a
formulation of this problem and its numerical implementation. We will
also present a mathematical result as well as numerical examples. |
Room Reservation Information
| Room Number: | MB114 |
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| Date: | 04 / 29 / 2010 |
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| Time: | 04:00pm - 05:00pm |
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