PSU Mark
Eberly College of Science Mathematics Department

Meeting Details

For more information about this meeting, contact Stephen Simpson.

Title:An inverse problem arising in photolithography
Seminar:Department of Mathematics Colloquium
Speaker:Fadil Santosa, IMA, University of Minnesota
Abstract Link:http://www.math.umn.edu/~santosa/
Abstract:
Photolithography is a key process in the manufacturing of chips. In this presentation, we will start with an introduction to the subwavelength projection photolithography. The basic problem is that of optimal design. It involves creating masks through which light is projected to produce a desired intensity pattern. I will describe a formulation of this problem and its numerical implementation. We will also present a mathematical result as well as numerical examples.

Room Reservation Information

Room Number:MB114
Date:04 / 29 / 2010
Time:04:00pm - 05:00pm